Brother CVD / PECVD tube furnace is a thin film deposition equipment based on plasma chemical vapor deposition technology, which can deposit thin films on various materials, including metals, semiconductors, insulators,etc. It can be widely used in microelectronics, optoelectronics, flat panel display, energy storage and other fields.
CVD/PECVD Tube Furnace Features
- High film deposition rate: RF glow technology, greatly increasing the deposition rate of the film, the deposition rate can reach 10Å / S
- High area uniformity: Advanced multi-point RF feeding technology, special gas path distribution, and heating technology, etc., make the film uniformity index reach 8%
- High consistency: using the advanced design concept of the semiconductor industry, the deviation between the substrates of one deposition is less than 2%
- High process stability: Highly stable equipment ensures a continuous and stable process.
Maximum temperature: 1200℃ (Heating wires)
50 segments programmable PID auto control.
double shell and air-cooled structure, furnace surface temperature below 50℃
304 stainless steel double sealing flange.
Adjustable flange support structure at both ends to extend the service life of the furnace tube.
Over-temperature protection function: when the temperature exceeds the allowed setting value automatically power off.
Safety protection: when the furnace has an electrical leakage, power off automatically.
Heating rate ≦20 C/ min
Temperature control accuracy ±1℃.
Maximum vacuum degree -0.1M Pa.
Equipped with molecular pump, max. vacuum up to 7x10-4 Pa.
Standard Parts
Furnace tube 1pc
Vacuum pump 1set
Vacuum sealing flange 1set
Vacuum pressure gauge 1pc
Optional Parts
Vacuum system (rotary vane mechanical pump, diffusion pump, molecular pump)
Atmosphere system (float flowmeter, mass flowmeter)
Quick discharge flange, tee flange
7-inch HD touch screen
CVD PECVD Tube Furnace Technical Parameters
| Model | Tube Dia*Heating Zone (mm) | Power | Max. Temp (℃) | Working Temp (℃) | Gas Control | Max. Vacuum |
|---|---|---|---|---|---|---|
BR-CVD-60 | 60*400 | 3 | 1200 | 1100 | 3 Way | 10 Pa or 7x10-3 Pa |
| BR-CVD-80 | 80*400 | 4 | 1200 | 1100 | 3 Way | 10 Pa or 7x10-3 Pa |
| BR-CVD-100 | 100*400 | 6 | 1200 | 1100 | 3 Way | 10 Pa or 7x10-3 Pa |
| Model | Tube Dia*Heating Zone (mm) | Power | Max. Temp (℃) | Working Temp (℃) | RF Frequency | RF Power (W) | Gas Control | Max. Vacuum |
|---|---|---|---|---|---|---|---|---|
BR-PECVD-60 | 60*450 | 4 | 1200 | 1100 | 13.56MHz ± 0.005% | 300 - 500 | 3 Way | 10 Pa or 7x10-3 Pa |
| BR-PECVD-80 | 80*450 | 5 | 1200 | 1100 | 13.56MHz ± 0.005% | 300 - 500 | 3 Way | 10 Pa or 7x10-3 Pa |
| BR-PECVD-100 | 100*450 | 7 | 1200 | 1100 | 13.56MHz ± 0.005% | 300 -500 | 3 Way | 10 Pa or 7x10-3 Pa |
*Other size can be customized.
